Anticipating, measuring, and minimizing MEMS mirror scan error to improve laser scanning microscopy's speed and accuracy.
basic_science · Level V
Where this comes from
- Record sourced from PubMed, PMID 28973013.
- Also identified by DOI 10.1371/journal.pone.0185849 and PMC identifier 5626505.
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Abstract
We describe a method to speed up microelectromechanical system (MEMS) mirror scanning by > 20x, while also improving scan accuracy. We use Landweber deconvolution to determine an input voltage which would produce a desired output, based on the measured MEMS impulse response. Since the MEMS is weakly nonlinear, the observed behavior deviates from expectations, and we iteratively improve our input to minimize this deviation. This allows customizable MEMS angle vs. time with <1% deviation from the desired scan pattern. We demonstrate our technique by optimizing a point scanning microscope's raster patterns to image mammal submandibular gland and pollen at ~10 frames/s.
Medical subject headings
- Equipment Design
- Micro-Electrical-Mechanical Systems
- Microscopy, Confocal