Oxide-mediated recovery of field-effect mobility in plasma-treated MoS<sub>2</sub>.
basic_science · Level V
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- Record sourced from PubMed, PMID 29511736.
- Also identified by DOI 10.1126/sciadv.aao5031 and PMC identifier 5837433.
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Abstract
Precise tunability of electronic properties of two-dimensional (2D) nanomaterials is a key goal of current research in this field of materials science. Chemical modification of layered transition metal dichalcogenides leads to the creation of heterostructures of low-dimensional variants of these materials. In particular, the effect of oxygen-containing plasma treatment on molybdenum disulfide (MoS<sub>2</sub>) has long been thought to be detrimental to the electrical performance of the material. We show that the mobility and conductivity of MoS<sub>2</sub> can be precisely controlled and improved by systematic exposure to oxygen/argon plasma and characterize the material using advanced spectroscopy and microscopy. Through complementary theoretical modeling, which confirms conductivity enhancement, we infer the role of a transient 2D substoichiometric phase of molybdenum trioxide (2D-MoO <sub><i>x</i></sub> ) in modulating the electronic behavior of the material. Deduction of the beneficial role of MoO <sub><i>x</i></sub> will serve to open the field to new approaches with regard to the tunability of 2D semiconductors by their low-dimensional oxides in nano-modified heterostructures.