Ultra Gas-Proof Polymer Hybrid Thin Layer.

Lee, Lynn; Yoon, Kwan Hyuck; Jung, Jin Won; Yoon, Hong Rho; Kim, Hongbum; Kim, Seung Hun; Song, Seung Yong; Park, Kyung Sun et al. · Nano Lett · 2018

basic_science · Level V

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Abstract

Hermetic sealing is an important technology for isolating and protecting air-sensitive materials and is key in the development of foldable and stretchable electronic devices. Here we report an ultra gas-proof polymer hybrid thin layer prepared by filling the free volume of the polymer with Al<sub>2</sub>O<sub>3</sub> using gas-phase atomic layer infiltration. The high-density polymer-inorganic hybrid shows extremely low gas transmission rate, below the detection limit of the Ca corrosion test (water vapor transmission rate <10<sup>-7</sup> g m<sup>-2</sup> day<sup>-1</sup>). Furthermore, because of the remarkable nanometer-scale thinness of the complete polymer-inorganic hybrid, it is highly flexible, which makes it useful for hermetic sealing of stretchable and foldable devices.