Freestanding Oxide Ferroelectric Tunnel Junction Memories Transferred onto Silicon.

Lu, Di; Crossley, Sam; Xu, Ruijuan; Hikita, Yasuyuki; Hwang, Harold Y · Nano Lett · 2019

basic_science · Level V

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Abstract

Crystalline oxide ferroelectric tunnel junctions enable persistent encoding of information in electric polarization, featuring nondestructive readout and scalability that can exceed current commercial high-speed, nonvolatile ferroelectric memories. However, the well-established fabrication of epitaxial devices on oxide substrates is difficult to adapt to silicon substrates for integration into complementary metal-oxide-semiconductor electronics. In this work, we report ferroelectric tunnel junctions based on 2.8 nm-thick BaTiO<sub>3</sub> films grown epitaxially on SrTiO<sub>3</sub> growth substrates, released, and relaminated onto silicon. The performance of the transferred devices is comparable to devices characterized on the oxide substrate, suggesting a viable route toward next-generation nonvolatile memories broadly integrable with different materials platforms.