Chemical force microscopy for hot-embossing lithography release layer characterization.
basic_science · Level V
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- Record sourced from PubMed, PMID 32680233.
- Also identified by DOI 10.1039/b600936k.
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Abstract
We employed variable temperature chemical force microscopy (VT-CFM) using tips silanized with four different hydro- and hydrofluoroalkyl self-assembling monolayers (SAMs) interacting with a thin-film of poly(cyclic olefin), (PCO) to model the hot-embossing stamp-polymer interaction over a temperature range spanning the glass transition of the PCO.