TiO<sub>2</sub> patterning using electro-hydrodynamic lithography.
basic_science · Level V
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- Record sourced from PubMed, PMID 32900018.
- Also identified by DOI 10.1039/b616538a.
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Abstract
An increasing number of technologies require the fabrication of micro- and nanostructures over large areas. Soft lithographic methods are gaining in popularity for the manufacture of low-cost micrometre and sub-micrometre structures. Increasingly, these methods developed to structure organic resists can also be used to pattern inorganic materials. Here we introduce a simple lithographic technique that is able to pattern ceramic TiO micro- and nanostructures with high fidelity. Our method makes use of an electrohydrodynamic (EHD) film instability that is controlled by a laterally modulated electric field. A spin-coated film of a stabilized metal alkoxide precursor material was patterned using EHD lithography followed by a heat treatment at 400 °C to yield crystalline TiO micropatterns. Our technique is rather general and can be extended to a number of single- and multicomponent oxide systems.