Inorganic Low <i>k</i> Cage-molecular Crystals.
basic_science · Level V
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- Record sourced from PubMed, PMID 33372783.
- Also identified by DOI 10.1021/acs.nanolett.0c03528.
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Abstract
For the interlayer dielectric in microelectronics, light element compounds are preferably accepted due to less electronic polarization. Here, the nontrivial dielectric nature of the Sb<sub>4</sub>O<sub>6</sub> cage-molecular crystal, known as α-antimony trioxide (α-Sb<sub>2</sub>O<sub>3</sub>), is reported. The gas-phase synthesized α-Sb<sub>2</sub>O<sub>3</sub> nanoflakes are of high crystal quality, from which the abnormal local admittance responses were revealed by scanning microwave impedance microscopy (sMIM). The remarkably low dielectric constant (<i>k</i>), 2.0∼2.5, is corroborated by the analysis of the thickness-dependent sMIM-capacitance signal. In light of the theoretical calculations, the ultralow molecular density and the significantly suppressed ionic polarization are both crucial to the highly reduced <i>k</i>. Combining with the excellent optical band gap, thermal stability, and breakdown strength, α-Sb<sub>2</sub>O<sub>3</sub> is a promising low <i>k</i> dielectric.