Atomic-Resolution Topographic Imaging of Crystal Surfaces.
basic_science · Level V
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- Record sourced from PubMed, PMID 33983030.
- Also identified by DOI 10.1021/acsnano.1c02907.
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Abstract
The surface of metal oxides is of technological importance and is extensively used as a substrate for various electronic and chemical applications. A real surface, however, is not a perfectly well-defined and clean surface, but rather contains a diverse class of atomistic defects. Here, we show the direct determination of the 3D surface atomic structure of SrTiO<sub>3</sub> (001) including termination layers and atomistic defects such as vacancies, adatoms, ledges, kinks, and their complex combinations, by using depth sectioning of atomic-resolution annular dark-field scanning transmission electron microscopy (ADF STEM). To overcome the poor depth resolution in STEM, we statistically analyze the column by column depth profiles of ADF STEM images with a Bayesian framework fitting algorithm, and we achieve depth resolution at the entrance surface of ±0.9 Å for 1518 individual atomic columns. The present atomic-resolution 3D electron microscopy at the surface will provide fertile ground especially in surface science.