Registered Deposition of Nanoscale Ferroelectric Grains by Template-Controlled Growth.

Clemens, S; Schneller, T; van der Hart, A; Peter, F; Waser, R · Adv Mater · 2005

basic_science · Level V

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Abstract

Regular patterns of ferroelectric PbTiO<sub>3</sub> nanostructures with lateral dimensions down to 30-60 nm have been grown onto platinized Si substrates by chemical solution deposition. The high registration of the grains is achieved by "top-down"-generated templates of TiO<sub>2</sub> dots as seeds for their deposition. Ferroelectricity was verified by piezoresponse force microscopy.