Solvent-free bottom-up patterning of zeolitic imidazolate frameworks.

Miao, Yurun; Lee, Dennis T; de Mello, Matheus Dorneles; Ahmad, Mueed; Abdel-Rahman, Mohammed K; Eckhert, Patrick M; Boscoboinik, J Anibal; Fairbrother, D Howard et al. · Nat Commun · 2022

basic_science · Level V

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Abstract

Patterning metal-organic frameworks (MOFs) at submicrometer scale is a crucial yet challenging task for their integration in miniaturized devices. Here we report an electron beam (e-beam) assisted, bottom-up approach for patterning of two MOFs, zeolitic imidazolate frameworks (ZIF), ZIF-8 and ZIF-67. A mild pretreatment of metal oxide precursors with linker vapor leads to the sensitization of the oxide surface to e-beam irradiation, effectively inhibiting subsequent conversion of the oxide to ZIFs in irradiated areas, while ZIF growth in non-irradiated areas is not affected. Well-resolved patterns with features down to the scale of 100 nm can be achieved. This developer-free, all-vapor phase technique will facilitate the incorporation of MOFs in micro- and nanofabrication processes.