Laser-Driven One- and Two-Dimensional Subwavelength Periodic Patterning of Thin Films Made of a Metal-Organic MoS<sub>2</sub> Precursor.
basic_science · Level V
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- Record sourced from PubMed, PMID 35608356.
- Also identified by DOI 10.1021/acsnano.2c00671.
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Abstract
Laser-based surface processing is an established way for the maskless generation of surface structures and functionalities on a large variety of materials. Laser-driven periodic surface texturing and structuring of thin films is reported for metallic-, semiconductive-, and polymeric films. Here, we introduce subwavelength surface patterning of metal-organic thin films of [Mo<sub>2</sub>S<sub>4</sub>(S<sub>2</sub>CN<sup><i>n</i></sup>Bu<sub>2</sub>)<sub>2</sub>], a MoS<sub>2</sub> precursor. Accurate control of one- and two-dimensional (1D and 2D) periodic patterns is achieved on silicon wafers with a pulsed 532 nm ns laser. With suitable combinations of laser polarization, laser pulse energy, the thickness of the SiO<sub>2</sub> passivation layer, and the MoS<sub>2</sub> precursor's thin film thickness, high-quality 1D and 2D self-organized periodic structures are obtained in virtually unlimited areas. The material redistribution related to the pattern formation is thermally driven at low laser energies. Increasing pulse energies beyond a threshold level, in our experiments a factor of 2, fully converts the precursor to MoS<sub>2</sub>.