Rapid and up-scalable manufacturing of gigahertz nanogap diodes.

Loganathan, Kalaivanan; Faber, Hendrik; Yengel, Emre; Seitkhan, Akmaral; Bakytbekov, Azamat; Yarali, Emre; Adilbekova, Begimai; AlBatati, Afnan et al. · Nat Commun · 2022

basic_science · Level V

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Abstract

The massive deployment of fifth generation and internet of things technologies requires precise and high-throughput fabrication techniques for the mass production of radio frequency electronics. We use printable indium-gallium-zinc-oxide semiconductor in spontaneously formed self-aligned <10 nm nanogaps and flash-lamp annealing to demonstrate rapid manufacturing of nanogap Schottky diodes over arbitrary size substrates operating in 5 G frequencies. These diodes combine low junction capacitance with low turn-on voltage while exhibiting cut-off frequencies (intrinsic) of >100 GHz. Rectifier circuits constructed with these co-planar diodes can operate at ~47 GHz (extrinsic), making them the fastest large-area electronic devices demonstrated to date.