Probing material absorption and optical nonlinearity of integrated photonic materials.

Gao, Maodong; Yang, Qi-Fan; Ji, Qing-Xin; Wang, Heming; Wu, Lue; Shen, Boqiang; Liu, Junqiu; Huang, Guanhao et al. · Nat Commun · 2022

basic_science · Level V

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Abstract

Optical microresonators with high quality (Q) factors are essential to a wide range of integrated photonic devices. Steady efforts have been directed towards increasing microresonator Q factors across a variety of platforms. With success in reducing microfabrication process-related optical loss as a limitation of Q, the ultimate attainable Q, as determined solely by the constituent microresonator material absorption, has come into focus. Here, we report measurements of the material-limited Q factors in several photonic material platforms. High-Q microresonators are fabricated from thin films of SiO<sub>2</sub>, Si<sub>3</sub>N<sub>4</sub>, Al<sub>0.2</sub>Ga<sub>0.8</sub>As, and Ta<sub>2</sub>O<sub>5</sub>. By using cavity-enhanced photothermal spectroscopy, the material-limited Q is determined. The method simultaneously measures the Kerr nonlinearity in each material and reveals how material nonlinearity and ultimate Q vary in a complementary fashion across photonic materials. Besides guiding microresonator design and material development in four material platforms, the results help establish performance limits in future photonic integrated systems.