Hysteresis-Free Contact Doping for High-Performance Two-Dimensional Electronics.

Ho, Po-Hsun; Chang, Jun-Ru; Chen, Chun-Hsiang; Hou, Cheng-Hung; Chiang, Chun-Hao; Shih, Min-Chuan; Hsu, Hung-Chang; Chang, Wen-Hao et al. · ACS Nano · 2023

basic_science · Level V

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Abstract

Contact doping is considered crucial for reducing the contact resistance of two-dimensional (2D) transistors. However, a process for achieving robust contact doping for 2D electronics is lacking. Here, we developed a two-step doping method for effectively doping 2D materials through a defect-repairing process. The method achieves strong and hysteresis-free doping and is suitable for use with the most widely used transition-metal dichalcogenides. Through our method, we achieved a record-high sheet conductance (0.16 mS·sq<sup>-1</sup> without gating) of monolayer MoS<sub>2</sub> and a high mobility and carrier concentration (4.1 × 10<sup>13</sup> cm<sup>-2</sup>). We employed our robust method for the successful contact doping of a monolayer MoS<sub>2</sub> Au-contact device, obtaining a contact resistance as low as 1.2 kΩ·μm. Our method represents an effective means of fabricating high-performance 2D transistors.