A heterogeneously integrated lithium niobate-on-silicon nitride photonic platform.

Churaev, Mikhail; Wang, Rui Ning; Riedhauser, Annina; Snigirev, Viacheslav; Blésin, Terence; Möhl, Charles; Anderson, Miles H; Siddharth, Anat et al. · Nat Commun · 2023

basic_science · Level V

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Abstract

The availability of thin-film lithium niobate on insulator (LNOI) and advances in processing have led to the emergence of fully integrated LiNbO<sub>3</sub> electro-optic devices. Yet to date, LiNbO<sub>3</sub> photonic integrated circuits have mostly been fabricated using non-standard etching techniques and partially etched waveguides, that lack the reproducibility achieved in silicon photonics. Widespread application of thin-film LiNbO<sub>3</sub> requires a reliable solution with precise lithographic control. Here we demonstrate a heterogeneously integrated LiNbO<sub>3</sub> photonic platform employing wafer-scale bonding of thin-film LiNbO<sub>3</sub> to silicon nitride (Si<sub>3</sub>N<sub>4</sub>) photonic integrated circuits. The platform maintains the low propagation loss (<0.1 dB/cm) and efficient fiber-to-chip coupling (<2.5 dB per facet) of the Si<sub>3</sub>N<sub>4</sub> waveguides and provides a link between passive Si<sub>3</sub>N<sub>4</sub> circuits and electro-optic components with adiabatic mode converters experiencing insertion losses below 0.1 dB. Using this approach we demonstrate several key applications, thus providing a scalable, foundry-ready solution to complex LiNbO<sub>3</sub> integrated photonic circuits.