Laser maskless fast patterning for multitype microsupercapacitors.

Yuan, Yongjiu; Li, Xin; Jiang, Lan; Liang, Misheng; Zhang, Xueqiang; Wu, Shouyu; Wu, Junrui; Tian, Mengyao et al. · Nat Commun · 2023

basic_science · Level V

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Abstract

Downsizing electrode architectures have significant potential for microscale energy storage devices. Asymmetric micro-supercapacitors play an essential role in various applications due to their high voltage window and energy density. However, efficient production and sophisticated miniaturization of asymmetric micro-supercapacitors remains challenging. Here, we develop a maskless ultrafast fabrication of multitype micron-sized (10 × 10 μm<sup>2</sup>) micro-supercapacitors via temporally and spatially shaped femtosecond laser. MXene/1T-MoS<sub>2</sub> can be integrated with laser-induced MXene-derived TiO<sub>2</sub> and 1T-MoS<sub>2</sub>-derived MoO<sub>3</sub> to generate over 6,000 symmetric micro-supercapacitors or 3,000 asymmetric micro-supercapacitors with high-resolution (200 nm) per minute. The asymmetric micro-supercapacitors can be integrated with other micro devices, thanks to the ultrahigh specific capacitance (220 mF cm<sup>-2</sup> and 1101 F cm<sup>-3</sup>), voltage windows in series (52 V), energy density (0.495 Wh cm<sup>-3</sup>) and power density (28 kW cm<sup>-3</sup>). Our approach enables the industrial manufacturing of multitype micro-supercapacitors and improves the feasibility and flexibility of micro-supercapacitors in practical applications.