Size-Dependent Phase Transition in Ultrathin Ga<sub>2</sub>O<sub>3</sub> Nanowires.

Wang, Jiaheng; Guan, Xiaoxi; Zheng, He; Zhao, Ligong; Jiang, Renhui; Zhao, Peili; Zhang, Ying; Hu, Jie et al. · Nano Lett · 2023

basic_science · Level V

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Abstract

Gallium oxide (Ga<sub>2</sub>O<sub>3</sub>) has attracted extensive attention as a potential candidate for low-dimensional metal-oxide-semiconductor field-effect transistors (MOSFETs) due to its wide bandgap, controllable doping, and low cost. The structural stability of nanoscale Ga<sub>2</sub>O<sub>3</sub> is the key parameter for designing and constructing a MOSFET, which however remains unexplored. Using in situ transmission electron microscopy, we reveal the size-dependent phase transition of sub-2 nm Ga<sub>2</sub>O<sub>3</sub> nanowires. Based on theoretical calculations, the transformation pathways from the initial monoclinic β-phase to an intermediate cubic γ-phase and then back to the β-phase have been mapped and identified as a sequence of Ga cation migrations. Our results provide fundamental insights into the Ga<sub>2</sub>O<sub>3</sub> phase stability within the nanoscale, which is crucial for advancing the miniaturization, light weight, and integration of wide-bandgap semiconductor devices.