Probing Linear to Nonlinear Damping in 2D Semiconductor Nanoelectromechanical Resonators toward a Unified Quality Factor Model.
basic_science · Level V
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- Record sourced from PubMed, PMID 37788247.
- Also identified by DOI 10.1021/acs.nanolett.3c02691.
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Abstract
In resonant nanoelectromechanical systems (NEMS), the quality (<i>Q</i>) factor is essential for sensing, communication, and computing applications. While a large vibrational amplitude is useful for increasing the signal-to-noise ratio, the damping in this regime is more complex because both linear and nonlinear damping are important, and an accurate model for <i>Q</i> has not been fully explored. Here, we demonstrate that by combining the time-domain ringdown and frequency-domain resonance measurements, we extract the accurate <i>Q</i> for two-dimensional (2D) MoS<sub>2</sub> and MoTe<sub>2</sub> NEMS resonators at different vibration amplitudes. In particular, in the transition region between linear and nonlinear damping, <i>Q</i> can be precisely extracted by fitting to the ringdown characteristics. By varying AC driving, we tune the <i>Q</i> by Δ<i>Q</i>/<i>Q</i> = 269% and extract the nonlinear damping coefficient. We develop the dissipation model that well captures the linear to nonlinear damping, providing important insights for accurately modeling and optimizing <i>Q</i> in 2D NEMS resonators.