Monolithic three-dimensional integration of RRAM-based hybrid memory architecture for one-shot learning.

Li, Yijun; Tang, Jianshi; Gao, Bin; Yao, Jian; Fan, Anjunyi; Yan, Bonan; Yang, Yuchao; Xi, Yue et al. · Nat Commun · 2023

basic_science · Level V

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Abstract

In this work, we report the monolithic three-dimensional integration (M3D) of hybrid memory architecture based on resistive random-access memory (RRAM), named M3D-LIME. The chip featured three key functional layers: the first was Si complementary metal-oxide-semiconductor (CMOS) for control logic; the second was computing-in-memory (CIM) layer with HfAlO<sub>x</sub>-based analog RRAM array to implement neural networks for feature extractions; the third was on-chip buffer and ternary content-addressable memory (TCAM) array for template storing and matching, based on Ta<sub>2</sub>O<sub>5</sub>-based binary RRAM and carbon nanotube field-effect transistor (CNTFET). Extensive structural analysis along with array-level electrical measurements and functional demonstrations on the CIM and TCAM arrays was performed. The M3D-LIME chip was further used to implement one-shot learning, where ~96% accuracy was achieved on the Omniglot dataset while exhibiting 18.3× higher energy efficiency than graphics processing unit (GPU). This work demonstrates the tremendous potential of M3D-LIME with RRAM-based hybrid memory architecture for future data-centric applications.