Silicon-van der Waals heterointegration for CMOS-compatible logic-in-memory design.

Lee, Mu-Pai; Gao, Caifang; Tsai, Meng-Yu; Lin, Che-Yi; Yang, Feng-Shou; Sung, Hsin-Ya; Zhang, Chi; Li, Wenwu et al. · Sci Adv · 2023

basic_science · Level V

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Abstract

Silicon CMOS-based computing-in-memory encounters design and power challenges, especially in logic-in-memory scenarios requiring nonvolatility and reconfigurability. Here, we report a universal design for nonvolatile reconfigurable devices featuring a 2D/3D heterointegrated configuration. By leveraging the photo-controlled charge trapping/detrapping process and the partially top-gated energy band landscape, the van der Waals heterostacking achieves polarity storage and logic reconfigurable characteristics, respectively. Precise polarity tunability, logic nonvolatility, robustness against high temperature (at 85°C), and near-ideal subthreshold swing (80 mV dec<sup>-1</sup>) can be done. A comprehensive investigation of dynamic charge fluctuations provides a holistic understanding of the origins of nonvolatile reconfigurability (a trap level of 10<sup>13</sup> cm<sup>-2</sup> eV<sup>-1</sup>). Furthermore, we cascade such nonvolatile reconfigurable units into a monolithic circuit layer to demonstrate logic-in-memory computing possibilities, such as high-gain (65 at <i>V</i><sub>dd</sub> = 0.5 V) logic gates. This work provides an innovative 3D heterointegration prototype for future computing-in-memory hardware.