Nanomembrane on Graphene: Delamination Dynamics and 3D Construction.

Abstract

Freestanding nanomembranes fabricated by lift-off technology have been widely utilized in microelectromechanical systems, soft electronics, and microrobotics. However, a conventional chemical etching strategy to eliminate nanomembrane adhesion often restricts material choice and compromises quality. Herein, we propose a nanomembrane-on-graphene strategy that leverages the weak van der Waals adhesion on graphene to achieve scalable and controllable release and 3D construction of nanomembranes. This fragile adhesion allows for precise delamination under stimulations, such as surface tension, thermal treatment, and mechanical bending. This strategy is compatible with various inorganic materials, including oxides, semiconductors, and metals, and allows for precise control of rolling and folding into 3D microstructures. Demonstrations include tubular microrobots with diverse locomotion and biodegradable nerve scaffolds based on facile delamination. Our nanomembrane-on-graphene strategy offers a versatile platform for the fabrication of functionalized microstructures.