Multi-project wafer runs for electronic graphene devices in the European 2D-Experimental Pilot Line project.
basic_science · Level V
Where this comes from
- Record sourced from PubMed, PMID 39915485.
- Also identified by DOI 10.1038/s41467-025-56357-0 and PMC identifier 11802748.
- Licence recorded as CC BY.
- The licence permits redistribution, so the abstract is shown in full and the full text is available from the publisher.
Abstract
The commercialization of electronic devices based on graphene has not yet been successful, even 20 years after its first isolation. To this end, the European Commission is supporting research toward establishing a European experimental pilot line for electronic and optoelectronic devices based on graphene and related two-dimensional (2D) materials, namely the Experimental Pilot Line (2D-EPL) project. Here, we report the results obtained during the first and third multi-project wafer (MPW) runs completed at the end of 2022 (MPW run 1) and 2023 (MPW run 3) as an outcome of the 2D-EPL. Test devices were measured across the wafers to assess the device quality and variability before delivering the fabricated dies to the customers. Raman spectroscopy confirmed minimal structural changes in the graphene caused by the fabrication process, while electrical measurements of two different device types verified the device specifications defined in the process design kit.