On-chip near-infrared multi-gas sensing using chalcogenide anti-resonant hollow-core waveguides.
basic_science · Level V
Where this comes from
- Record sourced from PubMed, PMID 40035412.
- Also identified by DOI 10.1039/d4lc00971a.
- No licence information is recorded for this record.
- Because redistribution is not established, this page shows the abstract only. Follow the links below for the full text.
Abstract
On-chip infrared spectroscopic gas sensing using a hollow-core anti-resonant reflecting optical waveguide (ARROW) with a large external confinement factor (ECF) was rarely reported due to the complex fabrication process and polarization dependence. Alternatively, we proposed ARROW gas sensors using chalcogenide (ChG) anti-resonant layers which require thermal evaporation and epoxy resin bonding for fabrication instead of the complicated wafer bonding process. Polarization characteristics and ethylene (C<sub>2</sub>H<sub>2</sub>) sensing performance at 1.532 μm were measured for two ARROW sensors with four-side (WG_A) and three-side (WG_B) anti-resonant layers around the hollow-core. Due to a symmetric structure, the 1 cm-long WG_A sensor exhibits polarization-insensitive characteristics, which does not require an additional polarization controller for integrated on-chip sensors and enhances the stability and reliability of the sensor under fluctuating polarization states. A high ECF of 71% and a 1<i>σ</i> limit of detection (LoD) of ∼23 parts-per-million (ppm) for WG_A were achieved at an averaging time of 39.2 s. The broadband multi-gas detection capability of WG_A was verified through C<sub>2</sub>H<sub>2</sub> detection at 1.532 μm and CH<sub>4</sub> at 1.654 μm, highlighting the potential of ARROWs for on-chip multi-gas sensing.