Monolithically Integrated C-Band Quantum Emitters on Foundry Silicon Photonics.

Pettit, Robert M; Deckoff-Jones, Skylar; Donis, Angela; Elias, Ana; Briscoe, Jayson; Leake, Gerald; Coleman, Daniel; Fanto, Michael et al. · Nano Lett · 2025

basic_science · Level V

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Abstract

Solid-state spin-based quantum systems have emerged as popular platforms for quantum networking applications due to their optical interfaces, their long-lived quantum memories, and their natural compatibility with semiconductor manufacturing. Photonic crystal cavities are often used to enhance radiative emission; however, fabrication of the necessary subwavelength cavities is typically limited to small batch electron beam lithography. In this work, we demonstrate high quality factor, small mode volume nanobeam cavities fabricated on a scalable silicon photonic foundry platform. The foundry fabricated cavities are then interfaced with single erbium ions through backend deposition of TiO<sub>2</sub> thin films lightly doped with erbium. Single ion lifetime measurements indicate Purcell enhancement up to about 500, thereby demonstrating a route toward manufacturable deterministic single photon sources in the telecom C-band.