Industry-compatible silicon spin-qubit unit cells exceeding 99% fidelity.

Steinacker, Paul; Dumoulin Stuyck, Nard; Lim, Wee Han; Tanttu, Tuomo; Feng, MengKe; Serrano, Santiago; Nickl, Andreas; Candido, Marco et al. · Nature · 2025

basic_science · Level V

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Abstract

Among the many types of qubit presently being investigated for a future quantum computer, silicon spin qubits with millions of qubits on a single chip are uniquely positioned to enable quantum computing. However, it has not been clear whether the outstanding high-fidelity operations and long coherence times shown by silicon spin qubits fabricated in academic settings<sup>1-8</sup> can be reliably reproduced when the qubits are manufactured in a semiconductor foundry<sup>9-11</sup>. Here we show precise qubit operation of silicon two-qubit devices made with standard semiconductor tooling in a 300-mm foundry environment. Of the key metrics, single- and two-qubit control fidelities exceed 99% for all four devices, and the state preparation and measurement fidelities reach up to 99.9%, as evidenced by gate set tomography. We report spin lifetime and coherence up to T<sub>1</sub> = 9.5 s, <math xmlns="http://www.w3.org/1998/Math/MathML"> <mrow> <msubsup><mrow><mi>T</mi></mrow> <mrow><mn>2</mn></mrow> <mrow><mo>*</mo></mrow> </msubsup> <mo>=</mo> <mn>40.6</mn> <mspace></mspace> <mi>μ</mi> <mi>s</mi></mrow> </math> and <math xmlns="http://www.w3.org/1998/Math/MathML"> <mrow> <msubsup><mrow><mi>T</mi></mrow> <mrow><mn>2</mn></mrow> <mrow><mi>Hahn</mi></mrow> </msubsup> <mo>=</mo> <mn>1.9</mn> <mspace></mspace> <mi>ms</mi></mrow> </math> . We determine that residual nuclear spin-carrying isotopes contribute substantially to operational errors, identifying further isotopic purification as a clear pathway to even higher performance.