Sulfur redox mediator for low-temperature flexible amorphous oxide CMOS electronics.

Wang, Mingyang; Zou, Taoyu; Reo, Youjin; Kim, Yong-Sung; Kim, Min Gyu; Choi, Minwoo; Park, Yongyoung; Yang, Kiyeon et al. · Sci Adv · 2025

basic_science · Level V

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Abstract

Amorphous p-type oxides are essential for next-generation flexible and scalable complementary metal-oxide semiconductor (CMOS) technologies. Among emerging candidates, tellurium-based oxides (Te-TeO<i><sub>x</sub></i>) show great promise due to their unique Te-Te conduction networks embedded within the amorphous TeO<sub>2</sub> matrix. However, controlled formation of these conduction channels remains challenging, limiting both hole transport and dopability under low thermal budgets. Here, we report a sulfur-mediated redox strategy that modulates the local bonding environment via TeO<sub>2</sub> dissociation and partial Te<sup>4+</sup> reduction, promoting formation of short-chain Te-Te networks. This enables high-performance p-channel thin-film transistors processed at an ultralow temperature of 120°C, exhibiting an average hole mobility of 11.5 cm<sup>2</sup> V<sup>-1</sup> s<sup>-1</sup> and on/off current ratios around 10<sup>6</sup> with high uniformity and reproducibility. Integration with n-type counterparts enables all-oxide CMOS circuits on both flexible and rigid substrates, including inverters with gain up to 1694, ring oscillators operating at 339 kHz, and large-scale functional circuits with rail-to-rail output.