2D Indium Oxide at the Epitaxial Graphene/SIC Interface: Synthesis, Structure, Properties, and Devices.

Turker, Furkan; Xu, Bohan; Dong, Chengye; Labella, Michael; Nayir, Nadire; Sheremetyeva, Natalya; Trdinich, Zachary J; Zhang, Duanchen et al. · Adv Mater · 2026

basic_science · Level V

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Abstract

Scaled and high-quality insulators are crucial for fabricating 2D/3D hybrid vertical electronic devices such as metal-oxide-semiconductor (MOS) based Schottky diodes and hot electron transistors, the production of which is constrained by the scarcity of bulk layered wide bandgap semiconductors. In this research, the synthesis of a new 2D insulator, monolayer InO<sub>2</sub>, which differs in stoichiometry from its bulk form is presented, over a large area (>300 µm<sup>2</sup>) by intercalating at the epitaxial graphene (EG)/SiC interface. By adjusting the lateral size of graphene through optical lithography prior to the intercalation, the thickness of InO<sub>2</sub> is tuned such that it is 85% monolayer. The preference for monolayer formation of InO<sub>2</sub> is explained using molecular dynamics and density functional theory (DFT) calculations. Additionally, the bandgap of InO<sub>2</sub> is calculated to be 4.1 eV, differing from its bulk form (2.7 eV). Furthermore, MOS-based Schottky diode measurements on InO<sub>2</sub> intercalated EG/n-SiC demonstrate that the EG/n-SiC junction transforms from ohmic to a Schottky junction upon intercalation, with a barrier height of 0.87 eV and a rectification ratio of ≈10<sup>5</sup>. These findings introduce a new addition to the 2D insulator family, demonstrating the utility of monolayer InO<sub>2</sub> as a barrier in vertical electronic devices.