Piezoelectrically actuated silicon-nitride-based high-speed spatial light modulator.
basic_science · Level V
Where this comes from
- Record sourced from PubMed, PMID 41298444.
- Also identified by DOI 10.1038/s41467-025-66718-4 and PMC identifier 12749027.
- Licence recorded as CC BY-NC-ND.
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Abstract
Advancements in light modulator technology have been driving discoveries and progress across various fields. The problem of large-scale coherent optical control of atomic quantum systems-including cold atoms, ions, and solid-state color centers-presents among the most stringent requirements. This motivates a new generation of high-speed large-scale modulator technology operating in the visible to near-infrared wavelength range. We introduce a scalable modulator technology based on piezoelectrically actuated silicon nitride resonant waveguide gratings fabricated on 200 mm diameter silicon wafers with CMOS-compatible processes. We present a proof-of-concept device with 4 × 4 individually addressable 50 μm × 50 μm pixels or channels, each containing a resonant waveguide grating with a ~ 780 nm design wavelength, supporting > 100 MHz modulation speeds, and a spectral response with > 20 dB extinction.