WSe<sub>2</sub> Monolayers Grown by Molecular Beam Epitaxy on hBN.

Kucharek, Julia; Raczyński, Mateusz; Bożek, Rafał; Kaleta, Anna; Kurowska, Bogusława; Bilska, Marta; Kret, Sławomir; Taniguchi, Takashi et al. · Nano Lett · 2025

basic_science · Level V

Where this comes from

Abstract

A three-step process was developed for growing high-quality, optically uniform WSe<sub>2</sub> monolayers by molecular beam epitaxy (MBE), taking advantage of the use of hexagonal boron nitride (hBN) as a substrate. The process was optimized to maximize the efficiency of photoluminescence and promote the formation of hexagonal WSe<sub>2</sub> domains. Atomic force microscopy was employed to estimate the dispersion of the WSe<sub>2</sub> hexagonal domains' orientation. Monolayer character of the film was identified using optical methods and verified with a high-resolution transmission electron microscopy cross-section. Temperature- and magnetic-field-dependent studies revealed the behavior of exciton complexes to be analogous to that of exfoliated counterparts. Direct growth on hBN, combined with a uniform optical response, proves that MBE-grown WSe<sub>2</sub> is superior to mechanically exfoliated WSe<sub>2</sub> in terms of the convenience of use and reproducibility. The provided results establish significant progress in the optical quality of epitaxially grown transition-metal dichalcogenide monolayers and the fabrication of large-scale functional devices.