High-κ samarium oxysulfate dielectric for two-dimensional electronics with enhanced gate coupling.

Yuan, Jiashuai; Jian, Chuanyong; Gong, Yujia; Ju, Qiankun; Cai, Qian; Kang, Jiahao; Liu, Wei · Nat Commun · 2025

basic_science · Level V

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Abstract

Layered dielectric materials and their van der Waals (vdW) heterostructures offer high potential for next-generation two-dimensional (2D) electronic devices, but materials that combine a wide bandgap and high dielectric constant are rare. Here, we present the controllable synthesis of quasi-vdW layered samarium oxysulfate (Sm<sub>2</sub>O<sub>2</sub>SO<sub>4</sub>) single crystals via a molten-salt-assisted chemical vapor deposition (CVD) method. These atomically thin crystals exhibit remarkable dielectric properties, including a wide bandgap (~5.54 eV), high dielectric constant (~18), robust breakdown voltage (>12 MV cm<sup>-1</sup>) and good thermal reliability. By integrating ultrathin Sm<sub>2</sub>O<sub>2</sub>SO<sub>4</sub> nanoplates with 2D molybdenum disulfide (MoS<sub>2</sub>) via vdW forces, we fabricate field-effect transistors (FETs) showing a subthreshold swing down to 65.2 mV dec<sup>-1</sup>, hysteresis down to 5.4 mV, on/off current ratios of ~10<sup>9</sup>, and gate leakage currents down to around 7 × 10<sup>-7 </sup>A cm<sup>-2</sup>. Furthermore, a high gate coupling ratio (GCR ~ 0.83) non-volatile memory device was developed based on the MoS<sub>2</sub>/h-BN/MLG/Sm<sub>2</sub>O<sub>2</sub>SO<sub>4</sub>/MLG heterostructure. The flash memory achieves ultrafast (~50 ns) programming/erasing operations, robust endurance (>2000 cycles) and long-term retention (>10 years). This work shows promising results for the integration of Sm<sub>2</sub>O<sub>2</sub>SO<sub>4</sub> as a high-κ dielectric in future 2D devices, with implications for low-power, high-performance electronics.