Wafer-scale ultrathin and uniform van der Waals ferroelectric oxide.
basic_science · Level V
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- Record sourced from PubMed, PMID 41610232.
- Also identified by DOI 10.1126/science.adz1655.
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Abstract
Ferroelectrics have great potential for nonvolatile memory and next-generation electronics, but conventional ferroelectric oxide films generally suffer structural nonuniformity, interfacial depolarization, and performance degradation, particularly when downscaled to advanced technology nodes. We demonstrate uniform, wafer-scale synthesis and back-end-of-line-compatible integration of ultrathin van der Waals (vdW) high-dielectric constant ferroelectric oxide Bi<sub>2</sub>SeO<sub>5</sub>, retaining an optimal coercive field and robust ferroelectricity at monolayer thickness. Ultrathin vdW ferroelectric oxides formed atomically uniform interfaces with two-dimensional semiconductors and yielded ferroelectric field-effect transistor (FeFET) arrays with a low operating voltage (0.8 volts), exceptional cycling endurance (>1.5 × 10<sup>12</sup> cycles), fast write speed (20 nanoseconds), high on/off ratio (10<sup>6</sup>), 10-year retention, ultralow energy consumption (2.8 femtojoules per bit per square micrometer), and <5% device-to-device variation. Reconfigurable logic-in-memory circuits with these FeFETs function at supply voltages of <1 volt.