Robust room-temperature ferroelectricity in the wide-bandgap semiconductor Ga<sub>2</sub>O<sub>3</sub>.

Shen, Jiaying; Fu Io, Weng; Liu, Chang; Wen, Yiyang; Wu, Han; Cao, Yilin; Yang, Yongtao; Dong, Dianmeng et al. · Sci Adv · 2026

basic_science · Level V

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Abstract

For decades, the integration of power handling and nonvolatile memory has been fundamentally impeded by the incompatibility between wide-bandgap semiconductors and ferroelectric materials. We resolve this challenge by demonstrating robust room-temperature ferroelectricity in epitaxial metastable κ-Ga<sub>2</sub>O<sub>3</sub>, grown via industry-compatible metal-organic chemical vapor deposition, creating an intrinsically ferroelectric wide-bandgap semiconductor. Through systematic characterization including piezoresponse force microscopy, polarization hysteresis measurements, and positive up-negative down tests, we provide conclusive evidence of stable ferroelectric switching down to 5-nanometer thickness-exceeding conventional ferroelectric limits-via a unique octahedral-tetrahedral transformation. Ferroelectric tunnel junctions achieve giant tunneling electroresistance exceeding 10<sup>5</sup>. This fundamental discovery in a mainstream semiconductor challenges conventional materials paradigms and enables monolithic integration of power and memory functionalities on a unified platform.