Fermi-level depinning achieved by high-work-function Au<sub>1-x</sub>Se<sub>x</sub> alloy contacts for high-performance p-type WSe<sub>2</sub> transistors.

Li, Wanying; Xia, Yipu; Kou, Yuanhao; Wang, Hai; Xu, Shaogang; Deng, Yujia; Ng, Chun Kit; Chen, Tianyuan et al. · Nat Commun · 2026

basic_science · Level V

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Abstract

P-type contact in two-dimensional (2D) transition metal dichalcogenides (TMDs) faces more severe Fermi-level pinning (FLP) than their n-type counterparts due to the damage caused by high-work-function metal deposition. Here, we demonstrate a simple molecular beam epitaxy (MBE) contact strategy using a high-work-function (5.8 eV) Au<sub>1-x</sub>Se<sub>x</sub> alloy to achieve Fermi-level depinning in monolayer WSe<sub>2</sub> p-type transistors. The Au<sub>1-x</sub>Se<sub>x</sub> alloy mitigates both defect-induced gap states (DIGS) and metal-induced gap states (MIGS) by gentle pre-deposition of selenium (Se) followed by the conversion to Au<sub>1-x</sub>Se<sub>x</sub> alloy by deposition of Au at low-temperature, forming a van der Waals (vdW) interface between Au<sub>1-x</sub>Se<sub>x</sub> and monolayer WSe<sub>2</sub>. Moreover, it imposes hole doping to the contacted monolayer WSe<sub>2</sub>, reducing the Schottky barrier height and enabling favorable p-type device performance. Combined experimental and theoretical analyses confirm quasi-ohmic contact behavior, yielding a contact resistance of 492 Ω·µm, an on-current of 385 µA/µm, and an on/off ratio greater than 10<sup>8</sup> for a p-FET with a 100 nm channel length. This work establishes Au<sub>1-x</sub>Se<sub>x</sub> alloy contacts as a scalable solution for high-performance p-type 2D electronics.