Two-dimensional pixel-level addressable mid-infrared metasurface spatial light modulator.

Abstract

Active metasurfaces enable dynamic control of light for applications in beam steering, pixelated holography, and adaptive optics, but demonstrations of two-dimensional electrically addressable arrays have so far been limited. Here we introduce a scalable two-dimensional architecture based on phase-change materials integrated metasurfaces and apply it to realize the first transmissive mid-infrared amplitude-only spatial light modulator. The device is fabricated through standard silicon photonic foundry processing combined with backend-of-line integration and employs multilayer backend metal interconnects to implement a crossbar addressing scheme. Each pixel is integrated with a silicon diode selector to suppress sneak-path currents, a feature essential for scaling to large arrays. The result establishes a foundry-compatible route to high-density, large-area active metasurfaces with independently tunable pixels.