Endurance beyond 10 billion cycles in wurtzite ferroelectrics by confining nitrogen vacancies.

Wang, Ruiqing; Zhu, Feng; Qian, Haoji; Zhou, Jiuren; Sun, Wenxin; Zheng, Siying; Chen, Jiajia; Li, Bochang et al. · Science · 2026

basic_science · Level V

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Abstract

Wurtzite ferroelectrics could provide a route to wafer-scale integrated ferroelectric memories but are limited by endurance, typically failing at ~10<sup>8</sup> cycles. We identified nitrogen-vacancy (<i>V</i><sub>N</sub>) clustering and long-range percolative migration as the defect-mediated pathways that drive leakage-current growth and dielectric breakdown. We combined a spatially engineered aluminum scandium nitride/aluminum nitride (AlScN/AlN) superlattice with a dynamic recovery protocol to spatially and energetically confine <i>V</i><sub>N</sub> evolution that stabilized defect topology under cyclic electrical stress and suppressed hard breakdown and ferroelectric degradation. We demonstrated endurance beyond 10<sup>10</sup> cycles in wurtzite ferroelectrics under a complete-switching criterion (remnant polarization ≥ 100 microcoulombs per square centimeter). These findings establish <i>V</i><sub>N</sub> confinement as a scalable defect-topology framework that couples atomic-scale defect stability to reliable ultradense ferroelectric memories and provide guidance for next-generation nonvolatile memory technologies.